90L100KA5NN60S4C7E03GBA424224 high pressure pump

The semiconductor industry is characterized by the need for precision and control in every aspect of fabrication. As the demand for smaller, more powerful, and energy-efficient devices grows, the methods and tools used in semiconductor manufacturing are evolving. One such critical tool is the plunger pump, which plays a pivotal role in high-precision fluid control processes in this sector.
90-L-100-KA-5-NN-60-S-4-C7-E-03-GBA-42-42-24
90L100KA5NN60S4C7E03GBA424224
Plunger pumps, also known as piston pumps, are positive displacement pumps that utilize a reciprocating piston to draw fluid into a chamber and then expel it with high pressure. This mechanism allows for accurate and controlled flow rates, making plunger pumps an ideal solution for applications requiring precision, such as in semiconductor fabrication.

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One of the primary applications of plunger pumps in semiconductor manufacturing is in the delivery of chemical precursors during various deposition processes, including chemical vapor deposition (CVD) and atomic layer deposition (ALD). In these processes, the precise composition and concentration of chemical vapors are crucial. The plunger pump provides consistent flow rates that ensure uniform deposition of materials on semiconductor wafers, which is essential for achieving the desired electrical and physical properties of the finished product.
Furthermore, the ability of plunger pumps to handle highly viscous and aggressive chemicals makes them suitable for delivering materials like photoresists and etchants. These fluids often require specific handling due to their properties, and plunger pumps can maintain stable flow characteristics that are essential for the even application of these materials. The high pressure generated by the pump also aids in ensuring that the fluids reach the necessary locations within the fabrication equipment without delays or inconsistencies.